The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2024

Filed:

Sep. 26, 2019
Applicant:

Kobe Steel, Ltd., Hyogo, JP;

Inventors:

Maiko Abe, Takasago, JP;

Koichiro Akari, Nagoya, JP;

Assignee:

Kobe Steel, Ltd., Hyogo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 8/24 (2006.01); C23C 8/36 (2006.01); G01K 7/04 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32522 (2013.01); C23C 8/24 (2013.01); C23C 8/36 (2013.01); G01K 7/04 (2013.01); H01J 37/32018 (2013.01); H01J 37/3244 (2013.01); H01J 37/32715 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/3387 (2013.01);
Abstract

Provided are a nitriding apparatus and a method of nitriding, which are capable of suppressing generation of a compound layer by accurately measuring temperature of an object to be treated by nitriding. A nitriding apparatus includes a chamber, a gas supplying unit, a support, a plasma source, a heater, a thermocouple wire including a temperature measuring section, an accommodating member, a power supply for an object to be treated, and a treatment condition control unit. The accommodating member internally accommodates the thermocouple wire to cover the temperature measuring section, while being insulated from the thermocouple wire. The power supply for an object to be treated applies a predetermined voltage to an object to be treated and the housing member so that the object to be treated and the accommodating member are set to an identical potential on the negative side.


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