The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2024
Filed:
Aug. 17, 2022
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Byunghoon Lee, Seoul, KR;
Jin Goo Park, Ansan-si, KR;
Tae-Gon Kim, Ansan-si, KR;
Sanguk Park, Yongin-si, KR;
Changyoung Jeong, Yongin-si, KR;
Jinho Ahn, Seoul, KR;
Hyun-tae Kim, Anyang-si, KR;
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); B08B 11/02 (2006.01); B08B 13/00 (2006.01); G03F 1/82 (2012.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 1/82 (2013.01); B08B 7/0028 (2013.01); B08B 11/02 (2013.01); B08B 13/00 (2013.01); G03F 7/70925 (2013.01);
Abstract
A pellicle cleaning apparatus includes a stage to support a pellicle, a particle remover above the stage, the particle remover being configured to remove a particle from a first surface of a pellicle, and the particle remover including a cantilever, and an adhesive material on a bottom surface of the cantilever, and a pressure controller adjacent to the stage, the pressure controller being configured to control a pressure of a fluid on a second surface of the pellicle.