The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2024
Filed:
Mar. 20, 2020
Owlstone Medical Limited, Cambridge, GB;
Owlstone Inc., Westport, CT (US);
Jonathan Pearson, Cambridge, GB;
Owlstone Medical Limited, Cambridge, GB;
Owlstone Inc., Westport, CT (US);
Abstract
The present techniques relate to methods of manufacturing MEMS gas sensors, for example, an ion mobility filter which may be used as a field asymmetric ion mobility spectrometry filter. The method comprises a step of providing a support with an aperture (S, S) and forming electrical connections (S) in the support. The method also comprises steps of attaching an electrode layer to the support (S) so that the electrode layer covers the aperture and forming a plurality of ion mobility electrodes (S) by mechanically dicing through the electrode layer. Each adjacent pair of electrodes defines an ion channel between them and each electrode is separate from the adjacent electrode(s).