The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2024
Filed:
Mar. 27, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Yen-Kun Wang, Santa Clara, CA (US);
Alex J. Tom, San Francisco, CA (US);
Ming Xu, San Jose, CA (US);
Ashley Okada, San Jose, CA (US);
Kenneth Le, Freemont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M 3/28 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01M 3/2815 (2013.01); H01L 21/67253 (2013.01);
Abstract
A method and system for monitoring and detecting a gas leak in a gas stick assembly is provided. The method includes measuring a pressure in a mass flow controller of the gas stick assembly at different time points and determining whether there is a difference in pressure at the different time points that exceeds a difference threshold.