The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2024
Filed:
Jan. 08, 2021
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Abidin Güçlü Onaran, Munich, DE;
David Tumpold, Kirchheim b München, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/22 (2006.01); B01D 69/10 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01N 21/17 (2006.01); H04R 7/02 (2006.01); H04R 9/08 (2006.01);
U.S. Cl.
CPC ...
B01D 69/10 (2013.01); B81B 7/0038 (2013.01); B81C 1/00285 (2013.01); G01N 21/1702 (2013.01); H04R 7/02 (2013.01); H04R 9/08 (2013.01); B01D 2325/028 (2013.01); B01D 2325/04 (2013.01); B01D 2325/24 (2013.01); B81B 2201/0257 (2013.01); G01N 2021/1704 (2013.01); G01N 29/222 (2013.01); H04R 2201/003 (2013.01); H04R 2201/025 (2013.01);
Abstract
The present disclosure concerns a micromechanical device and a method for manufacturing the same. The micromechanical device may comprise a membrane structure suspended on a substrate. The membrane structure may comprise a perforated gas permeable membrane comprising a plurality of perforations, and a reinforcement structure being coupled with the perforated membrane for stiffening the perforated membrane and/or for increasing the mechanical stability of the perforated membrane in order to attenuate an oscillation of the perforated membrane.