The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2024

Filed:

Jan. 18, 2022
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Wolfram Langheinrich, Dresden, DE;

Claus Dahl, Dresden, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H10N 60/01 (2023.01); H10N 60/10 (2023.01); H10N 69/00 (2023.01); G06N 10/40 (2022.01);
U.S. Cl.
CPC ...
H10N 69/00 (2023.02); H10N 60/01 (2023.02); H10N 60/11 (2023.02); H10N 60/128 (2023.02); G06N 10/40 (2022.01);
Abstract

A method of producing a quantum conveyor includes: forming a pair of screening gate electrodes in or on a semiconductor substrate and that extend between a first stationary quantum dot and a second stationary quantum dot, the pair of screening gate electrodes configured to delimit a channel of moveable quantum dots between the first stationary quantum dot and the second stationary quantum dot; forming, via a lithography process, a plurality of first planar transfer electrodes above the semiconductor substrate and that extend transverse to the channel of moveable quantum dots; and forming, via a self-aligned damascene process, a plurality of second planar transfer electrodes laterally interleaved with the first planar transfer electrodes, wherein the first planar transfer electrodes and the second planar transfer electrodes are configured to transfer quantum information between the first stationary quantum dot and the second stationary quantum dot through the channel of moveable quantum dots.


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