The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2024
Filed:
Jan. 06, 2022
Isteq B.v., Eindhoven, NL;
Rnd-isan, Ltd, Moscow, RU;
Samir Ellwi, Crawley, GB;
Denis Aleksandrovich Glushkov, Nieuwegein, NL;
Vladimir Vitalievich Ivanov, Moscow, RU;
Oleg Borisovich Khristoforov, Moscow, RU;
Konstantin Nikolaevich Koshelev, Moscow, RU;
Mikhail Sergeyevich Krivokorytov, Moscow, RU;
Vladimir Mikhailovich Krivtsun, Moscow, RU;
Aleksandr Andreevich Lash, Moscow, RU;
Vyacheslav Valerievich Medvedev, Moscow, RU;
Aleksandr Yurievich Vinokhodov, Moscow, RU;
ISTEQ B.V., Eindhoven, NL;
ISTEQ GROUP HOLDING B.V., Eindhoven, NL;
Abstract
A laser produced plasma light source comprises a vacuum chamber with a rotating target assembly supplying a target into an interaction zone with focused laser beam. The target is layer of a fluid and/or free-flowing target material on a surface of annular groove in the rotating target assembly. An output beam of short-wavelength radiation exits the interaction zone to an optical collector through the means for debris mitigation. A linear velocity of the target is not less than 100 m/s and a vector of the linear velocity of the target in the interaction zone is directed on one side of a plane passing through the interaction zone and the rotation axis while the focused laser beam and the output beam are located on another side of said plane. The optical collector comprises two ellipsoidal mirror units arranged in a tandem.