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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12027428 B1

PDFFull Text
Date of Patent:
Jul. 02, 2024

Filed:

Nov. 11, 2019

Semiconductor wafer evaluation method and manufacturing method and semiconductor wafer manufacturing process management method

Applicant:

Sumco Corporation, Tokyo, JP;

Inventors:

Takahiro Nagasawa, Saga, JP;

Masahiro Murakami, Saga, JP;

Assignee:

SUMCO CORPORATION, Tokyo, JP;

Attorney:

GREENBLUM & BERNSTEIN, P.L.C.

Primary Examiner:

Tri T Ton

Int. Cl.
CPC ...
H01L 21/20 (2006.01); G01N 21/956 (2006.01); H01L 21/02 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); G01N 21/956 (2013.01); H01L 21/02024 (2013.01); H01L 21/02052 (2013.01);
Abstract

Provided is an evaluation method of a semiconductor wafer having a polished surface, the method including a cleaning process of cleaning the semiconductor wafer with one or more kinds of cleaning liquid, measuring an LPD of the polished surface both before and after the cleaning process with a laser surface inspection device, and distinguishing the type of defect or foreign substance measured as the LPD, based on measurement results obtained in the measuring, according to distinguishing standards shown in Table A.

Find Patent Forward Citations

Nagasawa, Takahiro. (2024). Semiconductor wafer evaluation method and manufacturing method and semiconductor wafer manufacturing process management method (U.S. Patent No. 12027428). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12027428

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