The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2024

Filed:

Jan. 08, 2021
Applicant:

Chengdu Vistar Optoelectronics Co., Ltd., Sichuan, CN;

Inventors:

Bo Chen, Chengdu, CN;

Rubo Xing, Chengdu, CN;

Enqing Guo, Chengdu, CN;

Dong Wei, Chengdu, CN;

Xiaowei Li, Chengdu, CN;

Bo Chen, Chengdu, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 25/075 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); H01L 21/67144 (2013.01); H01L 25/0753 (2013.01); H01L 33/0095 (2013.01);
Abstract

A transfer device of micro-elements and manufacturing method thereof are provided in the present disclosure. The transfer device of micro-elements may comprise a vacuum chamber, a plurality of movable mass blocks and a plurality of electrode assemblies. The vacuum chamber may define a vacuum space and a plurality of through holes. The plurality of through holes can communicate the vacuum space with outside. The plurality of through holes can be configured to suck the micro-elements. The plurality of movable mass blocks may be arranged in the vacuum chamber. Each movable mass block may be arranged corresponding to a through hole. The plurality of electrode assemblies may be fixed in the vacuum chamber. Each electrode assembly can be arranged corresponding to a through hole.


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