The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2024
Filed:
May. 21, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Theodorus G. M. Oosterlaken, Oudewater, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67763 (2013.01); H01L 21/67259 (2013.01); G05B 2219/39024 (2013.01); G05B 2219/39527 (2013.01); G05B 2219/40555 (2013.01);
Abstract
A method for automatically calibrating the position of a wafer handling robot relative to a wafer carrier. The method comprises providing a semiconductor processing assembly comprising the wafer carrier and the wafer handling robot having an end effector, placing a wafer on a wafer support surface of the end effector, moving the end effector to an end position adjacent the wafer carrier, determining a displacement of the wafer on the wafer support surface, repeating these steps until the magnitude of the displacement meets a set end criterion, and storing the latest used end position as a calibrated end position.