The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2024

Filed:

Nov. 25, 2020
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Vilen K. Nestorov, Pleasanton, CA (US);

Kaushik Rao, Bangalore, IN;

Govinda Raj, Santa Clara, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01K 1/14 (2006.01); H05B 3/00 (2006.01); H05B 3/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); H01K 1/14 (2013.01); H05B 3/0047 (2013.01); H05B 3/0033 (2013.01); H05B 3/0038 (2013.01); H05B 2203/002 (2013.01); H05B 2203/006 (2013.01); H05B 2203/014 (2013.01);
Abstract

Examples disclosed herein relate to a lamp configured to provide heat for a processing chamber. The lamp includes a housing filled with a gas. A filament is disposed within the housing. The filament has an upper diameter, a lower diameter, and a length. A pair of electrodes is electrically coupled to the filament. A pair of pins is electrically coupled to the pair of electrodes. The pair of pins is configured to transfer energy to the filament. A ratio between either the upper diameter or the lower diameter to the length is about 0.3. The upper diameter is not equal to the lower diameter.


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