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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12027380 B1

PDFFull Text
Date of Patent:
Jul. 02, 2024

Filed:

Sep. 01, 2021

Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventors:

Tomohiko Sugita, Yokkaichi, JP;

Katsuhiro Sato, Yokkaichi, JP;

Hiroaki Ashidate, Mie, JP;

Assignee:

TOSHIBA MEMORY CORPORATION, Tokyo, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Keath T Chen

Assistant Examiner:

Margaret Klunk

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); H01L 21/02041 (2013.01); H01L 21/306 (2013.01); H01L 21/67057 (2013.01); H01L 21/67086 (2013.01); H01L 21/68771 (2013.01); H01L 21/6708 (2013.01);
Abstract

In one embodiment, a semiconductor manufacturing apparatus includes a substrate holder configured to hold a plurality of substrates such that the substrates are arranged in parallel to each other. The apparatus further includes a fluid injector including a plurality of openings that inject fluid to areas in which distances from surfaces of the substrates are within distances between centers of the substrates adjacent to each other, the fluid injector being configured to change injection directions of the fluid injected from the openings in planes that are parallel to the surfaces of the substrates by self-oscillation.

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Sugita, Tomohiko. (2024). Semiconductor manufacturing apparatus and method of manufacturing semiconductor device (U.S. Patent No. 12027380). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12027380

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