The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2024
Filed:
Mar. 08, 2022
Robert Bosch Gmbh, Stuttgart, DE;
Jochen Reinmuth, Reutlingen, DE;
Matthew Lewis, Reutlingen, DE;
ROBERT BOSCH GMBH, Stuttgart, DE;
Abstract
A MEMS switch having a substrate, a micromechanical function layer situated above the substrate, and a fixed part and an electrically operable, deflectable switch element are developed in the micromechanical function layer, the switch element for closing an electrically conductive contact with the fixed part being suspended on at least one first spring in a deflectable manner. In a first operating state, the switch element is in a first position at a first distance from the fixed part, and the electrical contact is open. In a second operating state, the switch element is in a second position at a second distance from the fixed part, and the first spring is deflected and exerts a first restoring force, and the switch element establishes an operative connection with at least one second spring and the electrical contact is open. In a third operating state, the switch element is in a third position.