The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2024

Filed:

May. 17, 2019
Applicants:

National University Corporation Tokai National Higher Education and Research System, Aichi, JP;

Sawafuji Electric Co., Ltd., Gunma, JP;

Inventors:

Shinji Kambara, Aichi, JP;

Yukio Hayakawa, Aichi, JP;

Tomonori Miura, Gunma, JP;

Tatsuya Ikeda, Gunma, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 3/04 (2006.01); B01D 53/04 (2006.01); B01D 53/22 (2006.01); C01B 3/50 (2006.01); C01B 3/56 (2006.01); C23C 16/30 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C30B 25/14 (2006.01); C30B 29/40 (2006.01); H01L 21/02 (2006.01); H01M 8/0606 (2016.01);
U.S. Cl.
CPC ...
C01B 3/047 (2013.01); B01D 53/04 (2013.01); B01D 53/229 (2013.01); C01B 3/503 (2013.01); C01B 3/56 (2013.01); C23C 16/303 (2013.01); C23C 16/4412 (2013.01); C23C 16/45593 (2013.01); C30B 25/14 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); B01D 2053/221 (2013.01); B01D 2253/104 (2013.01); B01D 2253/108 (2013.01); B01D 2256/16 (2013.01); B01D 2259/40083 (2013.01); B01D 2259/45 (2013.01); C01B 2203/041 (2013.01); C01B 2203/0425 (2013.01); C01B 2203/0861 (2013.01); H01M 8/0606 (2013.01);
Abstract

Provided are a hydrogen recycle system and a hydrogen recycle method, whereby hydrogen can be purified to high purity at high yield from a gas, said gas being exhausted from a nitride compound production device, and recycled. The hydrogen recycle system comprises an exhaust gas supply path supplying a gas exhausted from a nitride compound production device, a hydrogen recycle means and a hydrogen supply path. The hydrogen recycle means of the hydrogen recycle system is characterized by comprising: a plasma reaction vessel that defines at least a part of a discharge space; a hydrogen separation membrane that divides the discharge space from a hydrogen flow path communicated with the hydrogen supply path, defines at least a part of the discharge space by one surface thereof and also defines at least a part of the hydrogen flow path by the other surface thereof; an electrode that is disposed outside the discharge space; and an adsorbent that is filled in the discharge space and adsorbs the supplied exhaust gas.


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