The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2024

Filed:

Jan. 22, 2020
Applicant:

The Regents of the University of Michigan, Ann Arbor, MI (US);

Inventors:

Pei-Cheng Ku, Ann Arbor, MI (US);

Jingyang Sui, Atlanta, GA (US);

Kunook Chung, Ann Arbor, MI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/24 (2006.01); B81B 3/00 (2006.01); G01L 1/25 (2006.01); G01L 5/22 (2006.01); H01L 25/075 (2006.01); H01L 33/20 (2010.01);
U.S. Cl.
CPC ...
G01L 1/24 (2013.01); B81B 3/0029 (2013.01); G01L 1/25 (2013.01); G01L 5/226 (2013.01); H01L 25/0753 (2013.01); H01L 33/20 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0118 (2013.01);
Abstract

A device includes a substrate and a set of force sensors supported by the substrate. Each force sensor includes a pillar extending outward from the substrate, each pillar comprising a stack of semiconductor layers, the stack of semiconductor layers being configured to emit light upon biasing of the stack of semiconductor layers, and post disposed along only a portion of a perimeter of the pillar such that, taken together, the pillar and the post have an asymmetrical cross-sectional shape. Each pillar has a cross-section elongated along an axis. An orientation of the axis, and a peripheral position of the portion of the perimeter at which the post is disposed, differ across the set of force sensors such that a variation in light emitted by the stack of semiconductor layers of one or more of the force sensors is indicative of a direction of a shear force applied to the set of force sensors.


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