The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2024
Filed:
May. 20, 2022
Nanyang Technological University, Singapore, SG;
Xuan Quoc Vo, Singapore, SG;
Anh Tuan Tran, Singapore, SG;
Nanyang Technological University, Singapore, SG;
Abstract
A surface profile inspection method and a surface profile inspection system are provided. The surface profile inspection method includes capturing a plurality of interferograms of a surface profile depicting interference between a specimen beam reflected from a surface having the surface profile and a modulated reference beam, wherein each of the plurality of interferograms corresponds to a phase of modulation of the modulated reference beam; extracting pixel values of the plurality of interferograms; calculating phase information of each of the plurality of interferograms based on the extracted pixel values, the phase information of each of the plurality of interferograms related to the phase of modulation of the modulated reference beam at a time the interferogram was captured; and reconstructing the surface profile based on the calculated phase information.