The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2024

Filed:

Jul. 11, 2022
Applicant:

Oerlikon Surface Solutions Ag, Pfäffikon, Pfäffikon, CH;

Inventors:

Robert Raab, Vienna, AT;

Christian Martin Koller, Trofaiach, AT;

Paul Heinz Mayrhofer, Neckenmarkt, AT;

Mirjam Arndt, Bad Ragaz, CH;

Juergen Ramm, Maienfeld, CH;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); C23C 14/32 (2006.01); C23C 14/58 (2006.01); C23C 28/04 (2006.01);
U.S. Cl.
CPC ...
C23C 14/081 (2013.01); C23C 14/083 (2013.01); C23C 14/325 (2013.01); C23C 14/58 (2013.01); C23C 14/5806 (2013.01); C23C 14/5826 (2013.01); C23C 28/044 (2013.01);
Abstract

A method for producing an Al—Cr—O-based coating on a workpiece surface, including: a) placing a workpiece in an interior of a vacuum chamber, and b) depositing a film comprising aluminum and chromium on the workpiece surface to be coated, wherein a ratio of aluminum to chromium in the film in atomic percentage has a first value corresponding to Al/Cr≤2.3, and c) forming volatile compounds of Cr—O, thereby causing at least part of the chromium contained in the film to leave the film in a form of Cr—O volatile compounds, and d) executing step c) during a period of time, within which the chromium content in the film is reduced until attaining a second value of the ratio of aluminum to chromium in the film in atomic percentage corresponding to Al/Cr≥3.5, thereby the film is transformed into a film containing a reduced content of chromium.


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