The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2024
Filed:
Aug. 25, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Willem Cornelis Lambert Hopman, Deventer, NL;
Jan Matthijn Dekkers, Aadorp, NL;
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C04B 35/581 (2006.01); C04B 35/645 (2006.01); C23C 8/02 (2006.01); C23C 8/24 (2006.01); C23C 8/80 (2006.01); C23C 14/06 (2006.01); C23C 14/28 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0641 (2013.01); C04B 35/581 (2013.01); C04B 35/645 (2013.01); C23C 8/24 (2013.01); C23C 14/28 (2013.01); C04B 2235/3224 (2013.01);
Abstract
The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which includes the steps of: providing a scandium aluminum alloy body; pulverizing the scandium aluminum alloy body into scandium aluminum particles; nitridizing the scandium aluminum particles into scandium aluminium nitride particles; and hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.