The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2024
Filed:
Jun. 17, 2022
Screen Holdings Co., Ltd., Kyoto, JP;
Tomoyuki Shinohara, Kyoto, JP;
Kazuki Nakamura, Kyoto, JP;
Yoshifumi Okada, Kyoto, JP;
Takuma Takahashi, Kyoto, JP;
Takashi Shinohara, Kyoto, JP;
Nobuaki Okita, Kyoto, JP;
Junichi Ishii, Kyoto, JP;
SCREEN HOLDINGS CO., LTD., , JP;
Abstract
A lower-surface center region of a substrate held by a first holder is cleaned by a cleaner. A lower-surface outer region of the substrate rotated by a second holder is cleaned by the cleaner. A mobile base provided with the second holder and the cleaner is moved in a horizontal plane such that a reference position of the first holder coincides with a center axis of the second holder in a plan view when the substrate is received and transferred between the first holder and the second holder, and is moved in the horizontal plane such that the cleaner overlaps with the lower-surface center region of the substrate held by the first holder and a center axis of the cleaner coincides with a first portion different from a center of the substrate in the plan view when the lower-surface center region is cleaned.