The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2024
Filed:
Apr. 24, 2019
Applicant:
Kyocera Corporation, Kyoto, JP;
Inventors:
Yasunori Kawanabe, Kirishima, JP;
Yoshihiro Okawa, Kirishima, JP;
Yuusaku Ishimine, Aira, JP;
Shinya Terao, Kirishima, JP;
Assignee:
Kyocera Corporation, Kyoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/14 (2006.01); H05B 3/18 (2006.01);
U.S. Cl.
CPC ...
H05B 3/141 (2013.01); H05B 3/18 (2013.01); H05B 2203/003 (2013.01); H05B 2203/017 (2013.01);
Abstract
A heater includes a base body and a resistance heating element. The base body is configured by an insulating material and includes a top surface on which a wafer is placed. The resistance heating element extends in the base body along the top surface. A top surface of the resistance heating element and the base body are in contact with each other. A vacuum or gas-filled gap is interposed between a side surface of the resistance heating element and the base body.