The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2024
Filed:
Nov. 21, 2022
Applicant:
Photronics, Inc., Brookfield, CT (US);
Inventors:
Bryan S. Kasprowicz, Dallas, TX (US);
Christopher Progler, Plano, TX (US);
Assignee:
PHOTRONICS, INC., Brookfield, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 1/38 (2012.01); G03F 1/62 (2012.01); G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
G03F 7/2002 (2013.01); G03F 1/38 (2013.01); G03F 1/62 (2013.01); G03F 1/64 (2013.01);
Abstract
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.