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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12013636 B1

PDFFull Text
Date of Patent:
Jun. 18, 2024

Filed:

Nov. 02, 2021

Salt, acid generator, resist composition and method for producing resist pattern

Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Masahiko Shimada, Osaka, JP;

Koji Ichikawa, Osaka, JP;

Assignee:

SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;

Attorney:

Panitch Schwarze Belsiario & Nadel LLP

Primary Examiner:

John S Chu

Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 25/02 (2006.01); C07C 303/32 (2006.01); C07C 309/06 (2006.01); C07C 309/10 (2006.01); C07C 309/11 (2006.01); C07C 309/12 (2006.01); C07C 309/17 (2006.01); C07C 309/19 (2006.01); C07C 309/24 (2006.01); C07C 381/12 (2006.01); C07D 307/93 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/30 (2006.01); G03F 7/38 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 25/02 (2013.01); C07C 303/32 (2013.01); C07C 309/06 (2013.01); C07C 309/10 (2013.01); C07C 309/11 (2013.01); C07C 309/17 (2013.01); C07C 309/24 (2013.01); C07C 381/12 (2013.01); C07D 307/93 (2013.01); G03F 7/0382 (2013.01); G03F 7/0397 (2013.01); G03F 7/30 (2013.01); G03F 7/38 (2013.01); C07C 2603/74 (2017.05);
Abstract

Disclosed are a salt represented by formula (I), an acid generator and a resist composition: wherein Qand Qeach represent a fluorine atom or a perfluoroalkyl group; Rand Reach represent a hydrogen atom, a fluorine atom or a perfluoroalkyl group; z represents an integer of 0 to 6; Xrepresents *—CO—O—, *—O—CO—, etc.; Lrepresents a single bond or a hydrocarbon group which may have a substituent; Ar represents an aromatic hydrocarbon group which may have a substituent; Xrepresents an oxygen atom or a sulfur atom; Rrepresents a halogen atom or a haloalkyl group; Rrepresents a halogen atom, a hydroxy group, a haloalkyl group or an alkyl group; m1 represents an integer of 1 to 6; m2 represents an integer of 0 to 4; and Zrepresents an organic cation.

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