The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2024
Filed:
Aug. 03, 2022
Aac Kaitai Technologies (Wuhan) Co., Ltd, Hubei, CN;
Shitao Yan, Shenzhen, CN;
Zhan Zhan, Shenzhen, CN;
Shan Yang, Shenzhen, CN;
Zhao Ma, Shenzhen, CN;
Xiao Kan, Shenzhen, CN;
Hongtao Peng, Shenzhen, CN;
Yang Li, Shenzhen, CN;
Veronica Tan, Singapore, SG;
Yan Hong, Shenzhen, CN;
Kahkeen Lai, Singapore, SG;
AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD, Wuhan, CN;
Abstract
A MEMS accelerometer includes a base, proof mass, at least one pair of seesaw structures, and an out-of-plane displacement detection component. The at least one pair of the seesaw structures are oppositely disposed and fixed on the base through anchor points, and the out-of-plane displacement detection component is configured to detect rotation of the at least one pair of the seesaw structures or out-of-plane linear motion of the proof mass. Linear displacement of the MEMS accelerometer is not only beneficial to improve linearity of a capacitive displacement detection, but also to other non-capacitive detection methods, such as optical displacement detection. In addition, a double coupling structure is adopted to jointly couple rotation of seesaws, and remaining translational and rotational modes of the seesaw structures are suppressed.