The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 2024

Filed:

Oct. 14, 2022
Applicant:

Persimmon Technologies Corporation, Wakefield, MA (US);

Inventors:

Scott Wilkas, Lexington, MA (US);

Martin Hosek, Lowell, MA (US);

Jacob Lipcon, Arlington, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/04 (2006.01); B25J 9/10 (2006.01); B25J 11/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B25J 9/042 (2013.01); B25J 9/104 (2013.01); B25J 11/0095 (2013.01); H01L 21/67742 (2013.01);
Abstract

A substrate transport arm including a first link, a second link, a third link, and a mechanical transmission including a pulley. The third link includes an end effector configured to support a substrate thereon. The mechanical transmission is configured to control rotation of the third link on the second link as a function of an angle between the first and second links such that, as the first and second links are rotated relative to each other, the wrist joint follows a wrist path which includes a curved portion. Rotation of the third link relative to the second link is completely mechanically dependent upon rotational location of the second link on the first link. The rotation of the third link about the second link is mechanically constrained and limited by mechanical dependence based upon the function of the angle between the first and second links.


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