The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 2024

Filed:

Oct. 30, 2018
Applicant:

Jsw Aktina System Co., Ltd., Yokohama, JP;

Inventors:

Yoshihiro Yamaguchi, Yokohama, JP;

Miki Sawai, Yokohama, JP;

Sadao Tanigawa, Yokohama, JP;

Hirotaka Sazuka, Yokohama, JP;

Naoyuki Kobayashi, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/03 (2006.01); B23K 26/50 (2014.01); B23K 101/40 (2006.01); H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
B23K 26/032 (2013.01); B23K 26/50 (2015.10); H01L 21/268 (2013.01); B23K 2101/40 (2018.08);
Abstract

A laser processing apparatus () according to an embodiment includes a processing chamber () configured to perform laser processing for an object to be processed (), a stage () disposed inside the processing chamber (), the stage being configured to convey the object to be processed (), and a control unit () configured to instruct a loading/unloading apparatus () about a placement position of the object to be processed () over the stage (), the loading/unloading apparatus () being configured to load/unload the object to be processed () into/from the processing chamber (). Further, the processing chamber () includes a loading gate () for loading and an unloading gate () for unloading for the object to be processed (), and the object to be processed () is conveyed only in a first direction from the loading gate () toward the unloading gate () over the stage ().


Find Patent Forward Citations

Loading…