The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2024
Filed:
Jul. 01, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Yao-Hung Yang, Santa Clara, CA (US);
Shantanu Rajiv Gadgil, Santa Clara, CA (US);
Tanmay Pramod Gurjar, Sunnyvale, CA (US);
Sudhir R. Gondhalekar, Fremont, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 15/18 (2018.01); B05B 1/18 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
B05B 15/18 (2018.02); B05B 1/18 (2013.01); C23C 16/45565 (2013.01);
Abstract
Embodiments of showerheads for use in a process chamber and methods of reducing drooping of a showerhead faceplate are provided herein. In some embodiments, a showerhead for use in a process chamber includes: a faceplate having a plurality of gas distribution holes disposed therethrough; and one or more cables that engage with the faceplate and configured to prestress the faceplate.