The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Apr. 21, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A three-dimensional semiconductor memory device includes a peripheral circuit structure having peripheral circuits on a semiconductor substrate, and landing pads connected to the peripheral circuits, an electrode structure on the peripheral circuit structure, the electrode structure including vertically stacked electrodes, a planarized dielectric layer that covers the electrode structure, peripheral through plugs spaced apart from the electrode structure, the peripheral through plugs penetrating the planarized dielectric layer to connect to the landing pads, conductive lines connected through contact plugs, respectively, to the peripheral through plugs, and at least one dummy through plug adjacent to a first peripheral through plug of the peripheral through plugs, the at least one dummy through plug penetrating the planarized dielectric layer and being insulated from the conductive lines.