The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Jul. 07, 2021
Applicant:
Imec Vzw, Leuven, BE;
Inventors:
Jacopo Franco, Heverlee, BE;
Jean-Francois de Marneffe, Bossut-Gottechain, BE;
Tibor Grasser, Vienna, AT;
Assignee:
IMEC VZW, Leuven, BE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0234 (2013.01); H01L 21/02164 (2013.01);
Abstract
A method for improving a bias temperature instability of a SiOlayer comprises exposing the SiOlayer to atomic hydrogen.