Macro-to-micro two-stage camera lens focusing device based on direct-drive air floatation platform

Abstract

A macro-to-micro two-stage camera lens focusing device based on a direct-drive air floatation platform includes: a two-stage motion device with macro-motion and micro-motion focusing systems. The focusing device includes: a z-direction macro-motion system, a z-direction micro-motion focusing system, and a y-direction micro-motion focusing system. The macro-motion system includes flat-plate linear motors, a tubular linear motor, a tubular elastic balancing device, and an aerostatic air flotation platform; and the micro-motion focusing system includes a micro-motion platform base, piezoceramic actuators, micro-motion flexure hinges, a micro-motion platform, and an industrial camera lens. The focusing device realizes macro-to-micro two-stage focusing, captures a target through rapid motion of the aerostatic air flotation platform and the linear motors to perform coarse focusing, completes the micro-motion focusing by the piezoceramic actuators and the flexure hinges, realizes large-scale, high-speed, high-acceleration, high-precision, and high-stability focusing of two-stage focusing technology, and improves precision and efficiency of industrial measurement.