The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Dec. 08, 2021
Applicant:
Vaisala Oyj, Vantaa, FI;
Inventors:
Jukka Leppänen, Helsinki, FI;
Marko Jalonen, Vantaa, FI;
Assignee:
Vaisala Oyj, Vantaa, FI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01);
U.S. Cl.
CPC ...
G01N 27/225 (2013.01);
Abstract
According to an example aspect of the present invention, there is provided a sensor structure formed on a substrate comprising a sensor frame, comprising electric contacts for sensors, an active sensor within the sensor frame comprising at least a capacitive humidity sensor. In accordance with the invention the active sensor is connected to the sensor frame only by a thin thermally isolating layer supporting the active sensor, the thermally isolating layer including electric contacts from the sensor frame.