The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Apr. 22, 2020
University Public Corporation Osaka, Osaka, JP;
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Takuya Iida, Sakai, JP;
Shiho Tokonami, Sakai, JP;
Hiroki Ishikawa, Nagaokakyo, JP;
Tsutomu Yamasaki, Nagaokakyo, JP;
UNIVERSITY PUBLIC CORPORATION OSAKA, Osaka, JP;
MURATA MANUFACTURING CO., LTD., Kyoto, JP;
Abstract
A laser module includes a plurality of light emission regions and the plurality of light emission regions emit a plurality of laser beams. An optical waveguide and a lens condense the plurality of laser beams to an identical focal point. An adjustment mechanism is configured to adjust relative positional relation between the sample stage and a condenser lens (the optical waveguide and the lens). A controller is configured to switch between a single-point irradiation mode and a multi-point irradiation mode. The single-point irradiation mode refers to a mode in which the adjustment mechanism is controlled such that the focal point of the plurality of laser beams falls on the thin film. The multi-point irradiation mode refers to a mode in which the adjustment mechanism is controlled such that the focal point does not fall on the thin film.