The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Aug. 20, 2018
Applicant:
Uchicago Argonne, Llc, Chicago, IL (US);
Inventors:
Jeffrey W. Elam, Elmhurst, IL (US);
Joseph A. Libera, Clarendon Hills, IL (US);
Angel Yanguas-Gil, Northbrook, IL (US);
Assignee:
UCHICAGO ARGONNE, LLC, Chicago, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/40 (2006.01); C23C 16/52 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45527 (2013.01); C23C 16/40 (2013.01); C23C 16/45551 (2013.01); C23C 16/45553 (2013.01); C23C 16/45555 (2013.01); C23C 16/45574 (2013.01); C23C 16/52 (2013.01); C23C 16/54 (2013.01); C23C 16/545 (2013.01);
Abstract
A temporal Atomic Layer Deposition system and method utilizing precursor pulses applied to a moving substrate. The precursor pulses are self-exhausting.