The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Jul. 20, 2020
Korea Institute of Machinery & Materials, Daejeon, KR;
Kee-Bong Choi, Daejeon, KR;
Jae-Jong Lee, Daejeon, KR;
Geehong Kim, Daejeon, KR;
Hyungjun Lim, Daejeon, KR;
Soongeun Kwon, Seongnam-si, KR;
Junhyoung Ahn, Daejeon, KR;
KOREA INSTITUTE OF MACHINERY & MATERIALS, Daejeon, KR;
Abstract
In a leveling unit for imprinting and an imprint apparatus having the leveling unit, the leveling unit includes a base plate, a moving plate and a plurality of link parts. The moving plate is spaced apart from the base plate, and has a reference plane heading for an opposite direction of the base plate. The plurality of link parts connects the base plate with the moving plate, is spaced apart from each other by a predetermined distance along a circumferential direction with respect to a center of the reference plane, and is elastically and independently transformed by a pressing force applied to the reference plane to adjust an inclination of the moving plate.