The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Aug. 22, 2019
Applicant:
Toshiba Mitsubishi-electric Industrial Systems Corporation, Tokyo, JP;
Inventors:
Kensuke Watanabe, Tokyo, JP;
Ren Arita, Tokyo, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 (2006.01); C23C 16/452 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
H05H 1/2418 (2021.05); C23C 16/452 (2013.01);
Abstract
In the present invention, a high-voltage side electrode constituent part includes a dielectric electrode and metal electrodes formed on the upper surface of the dielectric electrode. The dielectric electrode has a structure in which a film thickness is continuously changed along an X direction. That is, the film thickness of the right end of the dielectric electrode is set to a thickness dA; and the film thickness of the left end is set to a thickness dB(>dA), and is continuously increased from the right end to the left end along the X direction.