The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Sep. 26, 2019
Applicant:
Mems Drive, Inc., Pasadena, CA (US);
Inventors:
Assignee:
MEMS DRIVE (NANJING) CO., LTD, Nanjing, CN;
Primary Examiner:
Int. Cl.
CPC ...
H02N 2/02 (2006.01); G02B 5/20 (2006.01); G02B 7/09 (2021.01); G02B 27/64 (2006.01); G03B 5/02 (2021.01); G03B 5/04 (2021.01); G03B 11/00 (2021.01); G03B 13/36 (2021.01); H02K 41/035 (2006.01); H02N 1/00 (2006.01);
U.S. Cl.
CPC ...
H02N 2/028 (2013.01); G02B 5/208 (2013.01); G02B 7/09 (2013.01); G02B 27/646 (2013.01); G03B 5/02 (2013.01); G03B 5/04 (2013.01); G03B 11/00 (2013.01); G03B 13/36 (2013.01); H02K 41/0356 (2013.01); H02N 1/008 (2013.01); G03B 2205/0015 (2013.01); G03B 2205/0061 (2013.01); H02K 2201/18 (2013.01);
Abstract
A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator; wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.