The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2024

Filed:

Jul. 16, 2021
Applicant:

Qorvo Us, Inc., Greensboro, NC (US);

Inventors:

Christo Bojkov, Plano, TX (US);

Zhi-Qi Li, Richardson, TX (US);

Michael Roberg, Evergreen, CO (US);

Harold Isom, Plano, TX (US);

Assignee:

Qorvo US, Inc., Greensboro, NC (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4238 (2013.01); H01L 29/42384 (2013.01); H01L 29/78633 (2013.01);
Abstract

RF devices, and more particularly RF devices with photo-imagable polymers for high frequency enhancements and related methods are disclosed. High frequency enhancements are realized by providing air cavities registered with one or more operating portions of RF devices. The air cavities are formed by photo-imagable polymer structures that provide separation from high dielectric constant materials associated with sealing materials, such as overmold materials, that are typically used for environmental and/or mechanical protection in RF devices. Related methods are disclosed that include forming the photo-imagable polymer structures and corresponding air cavities through various lamination and patterning of photo-imagable polymer layers. Further radiation hardening steps are disclosed that may be applied to the photo-imagable polymer structures after air cavities are formed to promote improved structural integrity of the air cavities during subsequent fabrication steps and during operation of the RF devices.


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