The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Jun. 10, 2021
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Kawasaki Robotics (Usa), Inc., Wixom, MI (US);
Haruhiko Tan, Kobe, JP;
Avish Ashok Bharwani, Santa Clara, CA (US);
Simon Jeyapalan, Newark, CA (US);
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
KAWASAKI ROBOTICS (USA), INC, Wixom, MI (US);
Abstract
A transport system includes a robot, sensors (an aligner sensor, a protrusion detecting sensor) and a controller. The robot having a hand which supports a wafer and transports the wafer to an aligner apparatus. The sensor detects the position of the wafer before the robot delivers the wafer to the aligner apparatus while supporting the wafer on the hand. The controller determines the positional deviation of the wafer based on a detection value of the sensor.