The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2024

Filed:

Apr. 11, 2019
Applicant:

Wisys Technology Foundation, Inc., Madison, WI (US);

Inventors:

Gokul Gopalakrishnan, Plateville, WI (US);

Mark Elliot Levenstein, Madison, WI (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/027 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); H01L 21/033 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0274 (2013.01); G03F 7/167 (2013.01); G03F 7/2004 (2013.01); H01L 21/0332 (2013.01); H01L 21/0337 (2013.01); H01L 21/32139 (2013.01);
Abstract

Methods for making molecular sieves are provided. The molecular sieves are comprised of thin semiconductors films in which a plurality of apertures is defined. The apertures are non-circular, nanoscale openings with tapered sidewalls that selectively pass certain molecules, while discriminating against the passage of other molecules.


Find Patent Forward Citations

Loading…