The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Aug. 28, 2020
Applicant:
Comet Technologies Usa, Inc., San Jose, CA (US);
Inventors:
Kirkwood Rough, San Jose, CA (US);
Aaron Cuttino, San Jose, CA (US);
Assignee:
COMET TECHNOLOGIES USA, INC., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01F 27/06 (2006.01); H01F 27/00 (2006.01); H01F 27/28 (2006.01); H01F 41/064 (2016.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01F 27/006 (2013.01); H01F 27/2828 (2013.01); H01F 41/064 (2016.01); H01J 37/321 (2013.01);
Abstract
A coil having a coil body and a plurality of concentric cross-section windings of wire disposed around the coil body, the wire having a spacing between adjacent turns of about 0.25 to 1.0 of the radius of the wire. Also, a coil for a plasma processing device, the coil having a coil body and a plurality of concentric cylindrical cross-section windings of wire disposed around the coil body, the wire having a spacing between adjacent turns of about 0.25 to 1.0 of the radius of the wire and a diameter to length ratio of between about 2:1 and about 3:1.