The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2024

Filed:

Apr. 14, 2021
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Ala Moradian, San Jose, CA (US);

Elizabeth Neville, Sunnyvale, CA (US);

Umesh Madhav Kelkar, Cupertino, CA (US);

Mark R. Denome, Sunnyvale, CA (US);

Prashanth Kothnur, San Jose, CA (US);

Karthik Ramanathan, Karnataka, IN;

Kartik Shah, Saratoga, CA (US);

Orlando Trejo, Santa Clara, CA (US);

Sergey Meirovich, Austin, TX (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G05B 13/02 (2006.01); G05B 19/418 (2006.01); G05B 19/41 (2006.01);
U.S. Cl.
CPC ...
G05B 19/41885 (2013.01); G05B 13/027 (2013.01); G05B 2219/32335 (2013.01); G05B 2219/32359 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67276 (2013.01);
Abstract

A method including receiving, by a processing device, a first selection of at least one of a first fabrication process or first manufacturing equipment to perform manufacturing operations of the first fabrication process. The method can further include inputting the first selection into a digital replica of the first manufacturing equipment wherein the digital replica outputs physical conditions of the first fabrication process. The method may further include determining environmental resource usage data indicative of a first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the physical conditions of the first fabrication process. The processing device may further determine a modification to the first fabrication process that reduces the environmental resource consumption of the first fabrication process run on the first manufacturing equipment. The method can further include performing at least one of applying the modification to the first fabrication.


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