The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Dec. 27, 2019
Applicant:
Clean Energy Labs, Llc, Austin, TX (US);
Inventors:
Alexander Joseph Pinkerton, Austin, TX (US);
Joseph F. Pinkerton, Austin, TX (US);
Assignee:
Brane Audio, LLC, Austin, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 33/02 (2006.01); B81C 1/00 (2006.01); G01R 33/028 (2006.01);
U.S. Cl.
CPC ...
G01R 33/0286 (2013.01); B81C 1/00158 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01);
Abstract
Nano-electromechanical systems (NEMS) devices that utilize thin electrically conductive membranes, which can be, for example, graphene membranes. The membrane-based NEMS devices can be used as sensors, electrical relays, adjustable angle mirror devices, variable impedance devices, and devices performing other functions. The NEMS devices have a serpentine shape arrangement of the electrically conductive membrane. The electrically conductive membrane can be controllably wicked down on the edge of the oxide cavity to increase sensitivity of the NEMS device.