The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Apr. 08, 2022
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Tobias Mittereder, Munich, DE;
Christoph Glacer, Munich, DE;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/17 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/1702 (2013.01); G01N 33/004 (2013.01); G01N 2021/1704 (2013.01); G01N 2021/1708 (2013.01); G01N 2223/508 (2013.01);
Abstract
A detector cell for a photoacoustic gas sensor comprises a first layer structure, a second layer structure arranged at the first layer structure and comprising a membrane structure, and a third layer structure arranged at the second layer structure. The first layer structure and the third layer structure hermetically enclose a cavity, wherein the membrane structure is arranged in the cavity.