The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Apr. 22, 2021
Applicant:
Analog Devices, Inc., Wilmington, MA (US);
Inventors:
Erdinc Tatar, Burlington, MA (US);
William A. Clark, Winchester, MA (US);
Assignee:
Analog Devices, Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/14 (2006.01);
U.S. Cl.
CPC ...
G01L 1/148 (2013.01);
Abstract
Microelectromechanical systems (MEMS) capacitive strain gauge sensors are described. The strain gauge sensors include a lever configured to mechanically amplify a strain response. In some embodiments, an anchored beam is coupled to the effort arm of the lever and a movable sensing finger to the resistance arm. The effort arm may be shorter than the resistance arm, thus providing a mechanical amplification.