The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2024
Filed:
Feb. 05, 2021
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Ventsislav Yantchev, Sofia, BG;
Julius Koskela, Helsinki, FI;
Viktor Plesski, Gorgier, CH;
Neal Fenzi, Santa Barbara, CA (US);
Patrick Turner, San Bruno, CA (US);
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Abstract
There are disclosed acoustic resonators, filter devices, and methods of fabricating acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, the back surface attached to a surface of a substrate except for portions of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. A conductor pattern on the front surface includes an interdigital transducer (IDT) with interleaved fingers of the IDT disposed on the diaphragm. A plurality of holes is in the diaphragm, wherein each of the plurality of holes is configured to scatter spurious modes in the diaphragm.