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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11996309 B1

PDFFull Text
Date of Patent:
May. 28, 2024

Filed:

May. 14, 2020

Wafer boat handling device, vertical batch furnace and method

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventor:

Christianus G. M. de Ridder, Hoogland, NL;

Assignee:

ASM IP Holding B.V., Almere, NL;

Attorney:

Snell & Wilmer L.L.P.

Primary Examiner:

Steven S Anderson, Ii

Int. Cl.
CPC ...
F23D 3/12 (2006.01); F27B 17/00 (2006.01); F27D 3/00 (2006.01); F27D 3/12 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); F27D 9/00 (2006.01); F27D 15/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67309 (2013.01); F27B 17/0025 (2013.01); F27B 17/0033 (2013.01); F27D 3/0084 (2013.01); F27D 3/12 (2013.01); H01L 21/67109 (2013.01); F27D 2003/0075 (2013.01); F27D 2009/0075 (2013.01); F27D 2009/0094 (2013.01); F27D 15/02 (2013.01);
Abstract

A wafer boat handling device, configured to be positioned under a process chamber of a vertical batch furnace. The wafer boat handling device comprises a main housing having a wall defining and bounding a wafer boat handling space, and a boat transporter comprising a wafer boat support for supporting a wafer boat and configured to transport the wafer boat to a cooldown position within the wafer boat handling space. A part of the wall adjacent the cooldown position is a wall part with a heat radiation surface absorptance of at least 0.60 so as to withdraw heat from the wafer boat which is in the cooldown position by means of heat radiation absorption.

Find Patent Forward Citations

de Ridder, Christianus G. M.. (2024). Wafer boat handling device, vertical batch furnace and method (U.S. Patent No. 11996309). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11996309

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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