The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2024
Filed:
Sep. 12, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
Sungyong Lim, Seoul, KR;
Chansoo Kang, Hwaseong-si, KR;
Youngdo Kim, Hwaseong-si, KR;
Namkyun Kim, Pyeongtaek-si, KR;
Sungyeol Kim, Yongin-si, KR;
Sangki Nam, Seongnam-si, KR;
Seungbo Shim, Seoul, KR;
Kyungmin Lee, Gwacheon-si, KR;
Abstract
A diagnostic device for diagnosing distribution of a radical in a plasma processing chamber, the diagnostic device, may include a spectrometer receiving an optical signal through at least one optical channel connected to the plasma processing chamber, and performing spectral analysis on the optical signal in response to a synchronization signal corresponding to each of states of a multi-level pulse applied to the plasma processing chamber and a synchronizer generating the synchronization signal corresponding to each of the states of the multi-level pulse.