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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11996270 B1

PDFFull Text
Date of Patent:
May. 28, 2024

Filed:

Aug. 13, 2021

Wafer processing apparatus

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Eunhee Jeang, Paju-si, KR;

Seongkeun Cho, Suwon-si, KR;

Kyungrim Kim, Anyang-si, KR;

Incheol Song, Hwaseong-si, KR;

Jangwon Cho, Suwon-si, KR;

Assignee:

Samsung Electronics Co., Ltd., , KR;

Attorney:

Myers Bigel, P.A.

Primary Examiner:

Kurt Sweely

Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/511 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32238 (2013.01); H01J 37/32229 (2013.01); H01J 37/32669 (2013.01); C23C 16/4404 (2013.01); C23C 16/45565 (2013.01); C23C 16/511 (2013.01); H01J 37/3244 (2013.01); H01J 37/3266 (2013.01); H01L 21/67069 (2013.01);
Abstract

A wafer processing apparatus includes a chamber body including a cavity region and a process region; a microwave waveguide configured to introduce a microwave into the cavity region; a first microwave window between the cavity region and the process region; and a magnetic field supplying device configured to apply a magnetic field inside the chamber body, wherein a thickness of the first microwave window is constant, and the first microwave window is configured to control a beam cross-section of the microwave in the process region.

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Jeang, Eunhee. (2024). Wafer processing apparatus (U.S. Patent No. 11996270). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11996270

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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