The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2024
Filed:
Jun. 23, 2023
Moxtek, Inc., Orem, UT (US);
Eric Miller, Provo, UT (US);
Moxtek, Inc., Orem, UT (US);
Abstract
A planar filamentcan include multiple materials to increase electron emission in desired directions and to suppress electron emission in undesired directions. The filamentcan include a core-material CM between a top-material TM and a bottom-material BM. The top-material TM can have a lowest work function WF; the bottom-material BM can have a highest work function WF; and the core-material CM can have an intermediate work function WF(WF<WF<WF). A width Wof the filamentat a top-sidecan be greater than its width Wat a bottom-side(W>W). This shape makes it easier to coat the edgeswith the bottom-material BM, because the edgestilt toward and partially face the sputter target. This shape also helps direct more electrons to a center of the target, and reduce electron emission in undesired directions.