The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2024

Filed:

Sep. 01, 2021
Applicant:

Waymo Llc, Mountain View, CA (US);

Inventors:

James Dunphy, San Jose, CA (US);

David Hutchison, Santa Clara, CA (US);

Assignee:

Waymo LLC, Mountain View, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/00 (2006.01); G03F 7/26 (2006.01); G02B 5/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/201 (2013.01); G03F 7/0005 (2013.01); G03F 7/2008 (2013.01); G03F 7/2014 (2013.01); G03F 7/26 (2013.01); G03F 7/7015 (2013.01); G02B 5/0891 (2013.01);
Abstract

Systems and methods described herein relate to the manufacture of optical elements and optical systems. An example system may include an optical component configured to direct light from a light source to illuminate a photoresist material at a desired angle and to expose at least a portion of an angled structure in the photoresist material, where the photoresist material overlays at least a portion of a top surface of a substrate. The optical component includes a container containing an light-coupling material that is selected based in part on the desired angle. The optical component also includes a mirror arranged to reflect at least a portion of the light to illuminate the photoresist material at the desired angle.


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