The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2024
Filed:
Jul. 19, 2018
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Seung Wook Kim, Gyeongsangnam-do, KR;
JuIll Lee, Chungcheongnam-do, KR;
Won Ki Jeong, Chungcheongnam-do, KR;
Dong Rak Jung, Chungcheongnam-do, KR;
Hong Hyun Kim, Gyeonggi-do, KR;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4411 (2013.01); C23C 16/45565 (2013.01); C23C 16/45572 (2013.01); H01J 37/32522 (2013.01); C23C 16/45551 (2013.01); C23C 16/4586 (2013.01); H01J 37/32082 (2013.01);
Abstract
Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.